Kayex CG6000 Silicon Crystal Growing Furnace
CG6000 6 inch ingot silicon crystal growing furnace
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The Kayex CG6000 Silicon Crystal Growing furnace is capable of
growing silicon ingots up to 6 inches in diameter.
Performance
| Typical Ingot Diameter |
6" (150 mm) |
| Pull Chamber Door Opening (W x H) |
11" x 68" (279 x 1727 mm) |
| Throat Diameter |
10" (254mm) |
| Seed Lift Rate |
0-20 in/hr (0-508 mm/hr) |
| Seed Jog Speed (Nominal) |
20 in/min (508 mm/min) |
| Total Crucible Travel |
11.5" (292 mm) |
| Crucible Lift Rate |
0-10 in/hr (0-254 mm/hr) |
| Crucible Jog Speed (Nominal) |
2.0 in/min (50.8 mm/min) |
| Seed Rotation (Reversible) |
0-50 rpm |
| Crucible Rotation (Reversible) |
0-20 rpm |
| Vacuum Pumps-Main |
107 cfm (3030 l/min) |
| (Recommended) Aux |
21 cfm (594 l/min) |
Silicon Charge Capacity
Standard Hot Zones for the CG6000 are available to fit the following crucible sizes:
| Crucible Diameter |
Crucible Height |
Charge Size
Cold Pack |
| 14 inches |
11 inches |
30 kg |
| 16 inches |
12 inches |
45 kg |
| 18 inches |
13.5
inches |
60 kg |
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Utility Requirements
Electrical
Furnace |
190 kVA, 380 / 400 / 440 460 ±10% VAC. 3Ø 50/60 Hz, FUSED FOR 375 / 350 / 325 / 300 amps |
| Coolant
Water |
| Maximum Inlet Temperature |
77° F (25°C) |
| Minimum
Flow Rate |
49 gpm (185.5 l/min) total |
| Diff. Supply Pressure |
38 psi (2.7 kg/cm2) |
| Argon |
| Mass
Flow Control (Max.) |
200 slpm |
| Recommended
Supply Pressure |
75 psi (5.3 kg/cm2) |
| Purge Flow |
75 slpm |
| Facility Total |
275 slpm |
| Air |
| Recommended
Supply Pressure |
90 psi (6.3 kg/cm2) |
Dimensions
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Furnace
Overall |
Control
Enclosure |
Power
Supply
(Heater) |
| Height |
206 in (5.22 m) |
63 in (1.60 m) |
39 in (0.98 m) |
| Width |
75 in (1.91 m) |
26 in (0.66 m) |
31 in (0.77 m) |
| Depth |
118 in (3.00 m) |
36 in (0.91 m) |
44 in (1.12 m) |
| Weight |
4,550 kg
(10,000 lb) |
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CG6000 Footprint
CG6000 Side View
CG6000 Console/Power Supply
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