Kayex CG3000 Silicon Crystal Growing Furnace
CG3000 4 inch ingot silicon crystal growing furnace
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CG3000 Overview
The Kayex CG3000 Silicon Crystal Growing furnace is capable of
growing silicon ingots up to 4 inches in diameter.
Performance
| Typical Ingot Diameter |
5" (125 mm) |
| Pull Chamber Height |
8” x 52” (203 x 1321 mm) |
| Throat Diameter |
7" (178 mm) |
| Seed Lift Rate |
0-20 in/hr (0-508 mm/hr) |
| Seed Jog Speed (Nominal) |
20 in/min (508 mm/min) |
| Total Crucible Travel |
11.5” (292 mm) |
| Crucible Lift Rate |
0-10 in/hr (0-254 mm/hr) |
| Crucible
Jog Speed (Nominal) |
2.0 in/min (50.8 mm/min) |
| Seed Rotation (Reversible) |
0-50 rpm |
| Crucible
Rotatio (Reversible) |
0-20 rpm |
| Vacuum
Pumps Main |
60 cfm (1700 l/min) |
| (Min.
recommended) Aux |
21 cfm (594 l/min) |
Silicon Charge Capacity
Hot zones are available to fit the following crucible sizes. Charges
can be enhanced with a feeder.
Crucible
Diameter |
Crucible
Height |
Charge
Size Cold Pack |
| 10.0 in |
7.0 in |
12 kg |
| 12.0 in |
9.0 in |
18 kg |
| 14.0 in |
11.0 in |
30 kg |
Utility Requirements
| Electrical
Furnace: |
160 kVA, 380 / 400 / 440 460 ±10% VAC. 3 PHASE 50/60 Hz, FUSED FOR 325 / 300 / 275 / 250 amps |
| Coolant
Water |
| Maximum
Inlet Temperature |
77°F (25°C) |
| Minimum
Flow Rate |
35 gpm (132 l/min) total |
| Diff.
Supply Pressure |
30 psi (2.1 kg/cm 2) |
| Argon |
| Mass
Flow Control (Max.) |
100 slpm |
| Purge
Flow |
75 slpm |
| Facility
Total |
175 slpm |
| Recommended
Supply Pressure |
75 psi (5.3 kg/cm 2) |
| Air |
| Recommended
Supply Pressure |
90 psi (6.3 kg/cm 2) |
Dimensions
|
Furnace
Overall |
Control Console |
Power
Supply |
| Height |
182 in (4.63 m) |
63 in (1.60 m) |
39 in (0.98 m) |
| Width |
75 in (1.87 m) |
26 in (0.66 m) |
31 in (0.77 m) |
| Depth |
118 in (2.20 m) |
36 in (0.91 m) |
44 in (1.21 m) |
| Weight |
8,000 lbs (3,640 kg) |
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CG3000 Footprint
CG3000 Side View
CG3000 Console/Power Supply
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